Back New Product Launch: FITOK Vacuum Generators
Vacuum generators are designed to create a vacuum and establish suction for purging piping systems and are widely used in the semiconductor industry. FITOK proudly introduces three series of vacuum generators: VGB Series, VGM Series, and VGC Series. The VGB series features a main structure similar to that of the VGM series but offers multiple options for inlet and vent ports, while the VGM series specifies the sizes and types of inlet and vent ports. In addition, the VGC series integrates vacuum venturi, air-actuated valve, and check valve to provide a compact design.
VGB and VGM Series Vacuum Generators
Features
- All welded construction improves sealing performance and service life
- Wetted surface roughness machine finished to Ra 15 μin. (0.38 μm)
- Ultrasonic and DI water cleaned for semiconductor ultra-high purity
- Final packaging in ISO calss 4 (FS 209E class 10 equivalent)
Technical Data
| N2 Inlet Pressure | 70 ~ 110 psig (4.8 ~ 7.6 bar) | |
| Vacuum Maximum | -26 in. Hg (-88 kPa) | |
| Working Temperature | 40 ~ 160 °F (-40 ~ 71 °C) | |
| Vacuum Port Maximum Pressure | 3500 psig (241 bar) | |
| Proof Pressure (Vacuum) | 5250 psig (345 bar) | |
| Burst Pressure (Vacuum) | 10500 psig (690 bar) | |
| Leak Rate (Helium) | Inboard | ≤ 2×10-10 std cm3/s |
| Outboard | ||
VGC Series Vacuum Generators
Features
- Air actuated valve controls the nitrogen supply to the vacuum venturi
- Check valve prevents backflow into the nitrogen supply
- Constant bleed option to maintain inert vent line
- Ultrasonic and DI water cleaned to ensure high purity
Technical Data
| N2 Inlet Pressure | 70 ~ 110 psig (4.8 ~ 7.6 bar) | |
| Vacuum Maximum | -26 in. Hg (-88 kPa) | |
| Working Temperature | 14 ~ 160 °F (-10 ~ 71 °C) | |
| Vacuum Port Maximum Pressure | 3500 psig (241 bar) | |
| Proof Pressure (Vacuum) | 5250 psig (345 bar) | |
| Burst Pressure (Vacuum) | 10500 psig (690 bar) | |
| Leak Rate | Bubble Tight | |
| Cracking Pressure① (Check Valve) | 3 psig (0.2 bar) Differential | |
| Cracking Pressure (Air-Actuated Valve) | 60 ~ 110 psig (4 ~ 7.6 bar) | |
| Constant Bleed② | CB025 | 1 ~ 2.5 slpm @ 5.5 bar (80 psig) N2 |
| CB050 | 2 ~ 5 slpm @ 5.5 bar (80 psig) N2 | |
| CB080 | 5 ~ 8 slpm @ 5.5 bar (80 psig) N2 | |
| CB150 | 10 ~ 15 slpm @ 5.5 bar (80 psig) N2 | |
Notes:
① Cracking pressure is a nominal value which may vary in specific applications.
② Constant bleed option includes additional check valve for bleed orifice.
In addition to vacuum generators, FITOK offers other types of diaphragm valves (DQ, DP, DH, DM, DS, DR, DV, DL, DF, DE, DK, and ALD series), Regulators (RDGC, RDCC, RTGC, RTCC series), High Purity Ball Valves (BGP, BHP, BDP, BRP series), High Purity Tubing (TBA, TEP, PEP and TCA series), Ultra High Purity Pressure Gauges GP Series, Gas Stick Assemblies (AGH and AGL series)，and more. These products are tailored to meet the exacting demands of fluid system components across industries, such as semiconductor manufacturing.
Please see the Vacuum Generators VGB and VGM Series Catalog, VGC Series Catalog for more information. Should you have any questions, please contact us directly and We will reach you soon.
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