Semiconductor Manufacturing and Applications (High Purity & Ultra High Purity)


FITOK provides a full range of fittings and components that are designed to be compatible with Semiconductor manufacturing and applications.

FITOK  High Purity & Ultra High Purity


FITOK High Purity & Ultra High Purity Products

We manufacture Face Seal Fittings, Cylinder Connections, Weld fittings, Diaphragm Valves, Regulators, Back Pressure Regulators, Bellows-sealed Valves, Bellows-sealed Metering Valves, Check Valves, Integrated Gas Systems and Point-of-use Panels.


FITOK  Class 100 Cleanroom  

Product customization service is also available, on different materials such as 316L VAR and 316L VIM-VAR stainless steel materials which are specifically designed for use in high purity applications. Ultra-High Purity cleaning, welding, assembly, testing and packaging are performed in our Class 100 cleanroom to prevent products from contamination.



◀ Class 100 Cleanroom



Popular Product Introduction


• Low Pressure Pneumatic Diaphragm Valves, DP Series


• Low Pressure Bellows-sealed Valves, SM Series

FITOK  Ultra High Purity, High Pressure, SVH Series   FITOK  MU Series, Bellows-sealed
  • Fully contained seat to provide excellent resistance to swelling and contamination
  • Elgiloy diaphragm to provide high strength and corrosion resistance
  • Fully functional under vacuum conditions


  • Metal-to-metal gasket seal without external leakage
  • Precision-formed metal bellows to ensure reliability
  • Non-rotating stem tip to increase shutoff cycle life


Applications: ultra-high purity gases, flammable and explosive gases, toxic gases and other special electronic gases.




• High Pressure Bellows-sealed Valves, SVH Series


• Bellows-Sealed Metering Valves, MU Series

FITOK  High Purity & Ultra High Purity   FITOK  High Purity & Ultra High Purity
  • 316L SS precision-formed bellows for long cycle life
  • PCTFE stem tip material with remarkable chemical and thermal resistance
  • Indicator switch assembled on pneumatic valves


Applications: ultra-high purity gases, flammable and explosive gases, toxic gases and other special electronic gases.



  • Reset spring design with no backlash for precise, repeatable flow settings
  • Micrometer handle measures stem position in 0.0008 in. (0.02 mm) increments
  • Valves open to maximum flow in six turns
  • Modular design to reduce maintenance cost






• Atomic Layer Deposition Diaphragm Valves, ALD Series


• Integrated Gas System

FITOK  ALD Series Atomic Layer Deposition Diaphragm Valves   FITOK  Integrated Gas System
  • Ultrahigh cycle life with high-speed actuation
  • Quick response capable of valve opening or closing time of less than 5 ms
  • Thermal actuator extends the life in applications where the body is heated
  • Valves with inductive sensors, solenoid valve assemblies, heater cartridge and thermocouple holes are available



  • Modular design - shorten design time
  • Surface mounting - easy installation and maintenance
  • Miniaturization
  • 316LVV material, electropolishing process and orbital welding
  • W-seal






• Locking Device



Locking Device    
  • To help prevent unintentional disassembly of FR connections
  • Used for FITOK FR metal gasket face seal assemblies with standard male and female nuts

Assembly Instructions for use with FR Face Seal Assemblies






Please contact us directly online or contact your nearest authorized distributor for more details!


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Last updated June 16, 2020


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