FITOK provides a full range of fittings and components that are designed to be compatible with Semiconductor manufacturing and applications.
FITOK High Purity & Ultra High Purity Products
We manufacture Face Seal Fittings, Cylinder Connections, Weld fittings, Diaphragm Valves, Regulators, Back Pressure Regulators, Bellows-sealed Valves, Bellows-sealed Metering Valves, Check Valves, Integrated Gas Systems and Point-of-use Panels.
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Product customization service is also available, on different materials such as 316L VAR and 316L VIM-VAR stainless steel materials which are specifically designed for use in high purity applications. Ultra-High Purity cleaning, welding, assembly, testing and packaging are performed in our Class 100 cleanroom to prevent products from contamination.
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◀ Class 100 Cleanroom
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Popular Product Introduction
• Low Pressure Pneumatic Diaphragm Valves, DP Series
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• Low Pressure Bellows-sealed Valves, SM Series
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- Fully contained seat to provide excellent resistance to swelling and contamination
- Elgiloy diaphragm to provide high strength and corrosion resistance
- Fully functional under vacuum conditions
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- Metal-to-metal gasket seal without external leakage
- Precision-formed metal bellows to ensure reliability
- Non-rotating stem tip to increase shutoff cycle life
Applications: ultra-high purity gases, flammable and explosive gases, toxic gases and other special electronic gases.
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• High Pressure Bellows-sealed Valves, SVH Series
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• Bellows-Sealed Metering Valves, MU Series
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- 316L SS precision-formed bellows for long cycle life
- PCTFE stem tip material with remarkable chemical and thermal resistance
- Indicator switch assembled on pneumatic valves
Applications: ultra-high purity gases, flammable and explosive gases, toxic gases and other special electronic gases.
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- Reset spring design with no backlash for precise, repeatable flow settings
- Micrometer handle measures stem position in 0.0008 in. (0.02 mm) increments
- Valves open to maximum flow in six turns
- Modular design to reduce maintenance cost
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• Atomic Layer Deposition Diaphragm Valves, ALD Series
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• Integrated Gas System
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- Ultrahigh cycle life with high-speed actuation
- Quick response capable of valve opening or closing time of less than 5 ms
- Thermal actuator extends the life in applications where the body is heated
- Valves with inductive sensors, solenoid valve assemblies, heater cartridge and thermocouple holes are available
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- Modular design - shorten design time
- Surface mounting - easy installation and maintenance
- Miniaturization
- 316LVV material, electropolishing process and orbital welding
- W-seal
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Please contact us directly online or contact your nearest authorized distributor for more details!
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