Product customization service is also available, on different materials such as 316L VAR and 316L VIM-VAR stainless steel materials which are specifically designed for use in high purity applications. Ultra-High Purity cleaning, welding, assembly, testing and packaging are performed in our Class 100 cleanroom to prevent products from contamination.

◀ Class 100 Cleanroom

• Low Pressure Pneumatic Diaphragm Valves, DP Series

• Low Pressure Bellows-sealed Valves, SM Series

• Fully contained seat to provide excellent resistance to swelling and contamination
• Elgiloy diaphragm to provide high strength and corrosion resistance
• Fully functional under vacuum conditions

• Metal-to-metal gasket seal without external leakage
• Precision-formed metal bellows to ensure reliability
• Non-rotating stem tip to increase shutoff cycle life

Applications: ultra-high purity gases, flammable and explosive gases, toxic gases and other special electronic gases.

• High Pressure Bellows-sealed Valves, SVH Series

• Bellows-Sealed Metering Valves, MU Series

• 316L SS precision-formed bellows for long cycle life
• PCTFE stem tip material with remarkable chemical and thermal resistance
• Indicator switch assembled on pneumatic valves

Applications: ultra-high purity gases, flammable and explosive gases, toxic gases and other special electronic gases.

• Reset spring design with no backlash for precise, repeatable flow settings
• Micrometer handle measures stem position in 0.0008 in. (0.02 mm) increments
• Valves open to maximum flow in six turns
• Modular design to reduce maintenance cost

• Atomic Layer Deposition Diaphragm Valves, ALD Series

• Integrated Gas System

• Ultrahigh cycle life with high-speed actuation
• Quick response capable of valve opening or closing time of less than 5 ms
• Thermal actuator extends the life in applications where the body is heated
• Valves with inductive sensors, solenoid valve assemblies, heater cartridge and thermocouple holes are available

• Modular design - shorten design time
• Surface mounting - easy installation and maintenance
• Miniaturization
• 316LVV material, electropolishing process and orbital welding
• W-seal

• Locking Device

• To help prevent unintentional disassembly of FR connections
• Used for FITOK FR metal gasket face seal assemblies with standard male and female nuts

Assembly Instructions for use with FR Face Seal Assemblies