ALD6L-FR8-6-HT-CF3
316L Stainless Steel, ALD Series Atomic Layer Deposition Diaphragm Valve, Thermal model, 1/2 in. Integral Male FR Fitting, 2-port, Vacuum to 145 psig (10 bar), 32°F to 392°F (0°C to 200°C), 0.62 Cv, NC Actuator, FITOK FC-03 Ultra-High Purity Process Specification